Single-Sided Roll-to-Roll Sputtering Coating Equipment (Three Chambers)

  Features  

·Expandable coating chambers for multi-process and high-speed deposition; 

·Plasma surface treatment to effectively improve the adhesion of the thin-filmlayers; 

·Multi-chamber sputtering process chamber improving production efficiency; 

·With multiple sets of isolated sputtering chambers enables deposition ofvarious materials; 

·Customizable coating width 300~1650 mm; 

·Integrated on-line optical inspection & on-line sheet resistance measurement; 

·Fully automatic roll-to-roll control system and alignment system.