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Integrated Single-Sided Roll-to-Roll Evaporation & Sputtering Coating Equipment

PRODUCTS AND SERVICES > Roll To Roll And Optical Equipment Series > Integrated Single-Sided Roll-to-Roll Evaporation & Sputtering Coating Equipment
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Integrated Single-Sided Roll-to-Roll Evaporation & Sputtering Coating Equipment

  Features  

·Combined evaporation & sputtering chamber; 

·Evaporation Chamber: single-sided evaporation for coating of low-temperatureevaporation materials (Al,Li,etc.); 

·Sputtering Chamber: 6 pairs of rotating targets, replaceable with planar targets; 

·Post-process Chamber: available for heating, cooling, gas treatment and plasmaprocessing, etc.

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