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中文|English

T-ALD/Spacial ALD Equipment

PRODUCTS AND SERVICES > Perovskite PV Equipment Series > T-ALD/Spacial ALD Equipment
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T-ALD/Spacial ALD Equipment

  Features  

·Time-based ALD, Low-temperature film deposition, Controllable film thickness accuracy.

·The coating has good density without pores, with excellent step coverage.

·Applied in industries such as crystalline silicon batteries, perovskite, HJT, HBC, and microelectronic device manufacturing.






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