Coating Integrated Machine (Batch/Inline Type)

  Features  

·The Coater is equipped with a high-precision motion stage, multi-stage coating control, automaticcleaning and drying of the liquid delivery system, and multiple safety protection features, with overall atmosphere controllable.

·The VCD features a multi-directional, multi-layer airflow uniform plate structure, enabling uniformand rapid vacuum pumping as well as pressure holding control.

·The annealing equipment is available in both batch-type and inline configurations, offering fast ramp-up rates and excellent steady-state temperature uniformity.