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Reactive Plasma Deposition Equipment

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Reactive Plasma Deposition Equipment

  Features  

·Low temp. process with low damage during deposition, with highcarrier mobility and high transmittance. 

·Equipment series range from R&D equipment to mass productionequipment.

·Vertical transfer & Horizontal transfer available. 

·Applied in Perovskite, HJT, HBC in PV/Panel Display/IC/Lithium-ionBattery industries.

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