Reactive Plasma Deposition

  Features  

·Low-damage, low-temperature, high-mobility and high-transmittance process, Maximum coating width 2400mm . 

·Comprehensive product portfolio covering from R&D equipment to mass production equipment; Vertical transfer & Horizontal transfer.

·Applied in industries such as perovskite, HJT, HBC photovoltaics, panel display, chips, and lithium batteries.