Tronway Wins Wet Process Equipment Orders from Multiple Power Device Fabs, Expanding from SiC to Silicon-Based Power Devices

Overview: 

In 2024, Tronway Changzhou Co., Ltd. (hereinafter referred to as Tronway), a subsidiary of Shenzhen S.C New Energy Technology Corporation, secured wet process equipment orders from two SiC power device fabs located in Jiangsu and Hubei provinces. Also, Tronway successfully won an order in 2025 for wet process batch cleaning equipment from a silicon-based power device Fab in Hunan province. Over the past two years, Tronway has established a comprehensive layout and cross-platform validation in the power semiconductor sector, spanning from third-generation semiconductors SiC to traditional silicon-based power devices. This achievement further consolidates Tronway’s comprehensive competitiveness and its advantage in domestic substitution within the wet process equipment sector.

I. Continuous Bid-winning: Domestic Turnkey Solutions are Favored by Power Device Manufacturers in Multiple Regions

In 2024, by virtue of its technical expertise in wet process batch cleaning and specialized surface treatment, Tronway successfully won bids from two SiC power device fabs located in Jiangsu and Hubei provinces. The company provides turnkey solutions for wet process equipment, covering wafer pre-treatment, post-etching cleaning, cleaning of metal and dielectric layers, and termination process cleaning.

In 2025, Tronway secured another order for a whole production line of Cassette-less Wet Process Batch Cleaning Equipment from a silicon-based power device Fab in Hunan province, achieving the successful cross-platform replication and scaled integration of its technology from SiC to silicon-based power device fab. This marks that the company’s whole production line capabilities have been deployed and qualified in multiple domestic power device fabs.

II. Turnkey Solutions for Wet Process: Integrated Delivery from Process to Equipment

Tronway will provide customers with:  

· Full-process wet process technology coverage: including critical steps such as pre-cleaning, post-etch cleaning, interlayer cleaning for metal/dielectric layers, and cleaning before final inspection;  

· Cassette-less Wet Process Platform: Compatible with 6-inch/8-inch power device production lines, focusing on optimizing particle control, metal ion residues, and water mark defects;  

· The whole production line integration and automation: Interfaces with Fab EAP systems to enable equipment status monitoring and process data traceability;

· Full-cycle services from integration to mass production: Including process evaluation, online validation, yield ramp-up, and long-term optimization support.  

Through its integrated delivery model of “Process + Equipment + Service,” Tronway helps clients shorten the integration cycle, improve yield and production line stability, while reducing the overall total cost of ownership (TCO).

III. SiC and Silicon-Based Dual-Driven Approach to Upgrade Domestic Power Semiconductor Production Lines

With the rapid growth of new energy vehicles, photovoltaics, and energy storage, the demand for power devices with high voltage resistance and reliability continues to rise. While SiC power devices are scaling up production, silicon-based power devices still play a pivotal role in numerous application scenarios.

Tronway has established dual-driven product and process capabilities covering both SiC and silicon-based power devices by:  

· Leveraging expertise in high-standard surface cleaning and defect control through a whole production line practices in SiC Fab.

· Optimizing and replicating process platforms and equipment configurations in silicon-based power device Fab.  

This dual-driven approach continuously advances technical upgrades in domestic power semiconductor production lines and promotes the integration of domestic equipment.

IV. Focused on Wet Process Technology, Serving Global Customers  

In the future, leveraging S.C’s industrial footprint in new energy and semiconductor equipment, Tronway will continue to deepen its focus on:

· Wet Process Batch Cleaning and Specialized Surface Treatment Platforms

· Customized Process Solutions for SiC, GaN, and Silicon-Based Power Devices  

· Highly Automated and Intelligent Turnkey Solutions for Wet Process

While continuing to provide first-class service to existing domestic customers, we are actively exploring overseas collaboration opportunities, partnering with more power device manufacturers to advance China’s wet processing equipment toward higher voltage, stricter reliability, and larger-scale mass production applications. We are committed to contributing “S.C Solutions” and the strength of “China Manufacturing Equipment”to the global power semiconductor supply chain.