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全自动石英舟装卸片机


设备名称 Equipment Name
· 全自动石英舟装卸片机  Automatic Wafer Handling System for DOA Equipment

设备型号 Equipment Model
· SYZ-V / SYZ-VI

设备用途 Equipment Usage

· 集装片和卸片一体,可从石英舟中把扩散后的硅片卸到片篮中,也可从片篮中将制绒后的硅片装入石英舟中。可在⼀个石英舟插槽中插⼊两片,实现单面扩散片工艺,也可在⼀个石英舟插槽中插入一片,实现双面扩散片工艺。采用装片与卸片可连续衔接⽅式,实现连续生产;也可单独装片或单独卸片。
 Integrated wafer loading& unloading, unloading the wafers from the quartz boat to the cassette or loading the wafers from the cassette to the quartz boat. Available for double back-to-back wafers in one slot which realize single side diffusion or available for single wafer in a slot for double-side diffusion. With continuous wafer loading&unloading can guarantee the continuous production . Or be used only for wafer loading or unloading is also available.

 

技术特点  Features

· 采用进口六轴机械⼿装卸片,确保硅片取放高可靠性。
  With imported six-axis lift to load/unload and ensures high reliability of picking and placing of wafers.

· HMI采用(IPC)工业计算机运行上位软件,通过网络通讯实现⾼速数据交互。
  With IPC to running master computer software in HMI, high speed data interaction can be realized by network communication.

· 采用工业相机CCD检测石英舟动态位置实现纠偏定位。
  With CCD industrial camera to detect dynamic location of quartz boat , which can realize deviation rectification and positioning.

· 卸片前设有冷却系统,可防止因高温带来对硅片和设备的不良影响。
  With cooling system before the unloading process, which can avoid any harmful effect on the wafers and equipment caused by high temperature.

· CCD影像预判舟内硅片状况结合机械臂各吸盘吸取状态实现漏吸与掉片检测。(选配,标准机型⽆此功能)
 CCD images show the wafers condition inside the quartz boat, combine with the gripping status of each gripper can realize mis-gripping and wafer dropping detection (optional, standard equipment without this function).

· CCD图像分析判断陶瓷顶齿区域碎片。(选配,标准机型无此功能)
  CCD images analyze the broken wafers in ceramic comb area.(optional).

· 可选配MES功能;可选配方阻检测模组;可选配AGV。 

  MES function, sheet resistance detection and AGV, optional.

 

设备参数  Parameters